RESIST STRIPPING AGENT AND STRIPPING METHOD USING THE SAME

PROBLEM TO BE SOLVED: To provide an inexpensive resist stripping agent which has an excellent resist stripping property and does not corrode aluminum and copper.SOLUTION: A resist for copper wiring or a resist for aluminum wiring is stripped with a resist stripping agent containing ethylene amine an...

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Bibliographische Detailangaben
Hauptverfasser:	TAKAHASHI FUMIHARU, HARA YASUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an inexpensive resist stripping agent which has an excellent resist stripping property and does not corrode aluminum and copper.SOLUTION: A resist for copper wiring or a resist for aluminum wiring is stripped with a resist stripping agent containing ethylene amine and aromatic organic acid.