METHOD FOR PRODUCING GLASS BODY AND METHOD FOR PRODUCING OPTICAL MEMBER FOR EUV LITHOGRAPHY

PROBLEM TO BE SOLVED: To provide a method for producing a quartz glass body containing a metal dopant and having more uniform concentration distribution.SOLUTION: The method for producing a glass body contains: hydrolyzing a silicon compound and a compound containing a metal serving as a dopant, in...

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Bibliographische Detailangaben
Hauptverfasser:	MIYASAKA JUNKO, KOIKE AKIO, OGAWA TOMOTAKA, KAWAGISHI MASAHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GLASS JOINING GLASS TO GLASS OR OTHER MATERIALS MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for producing a quartz glass body containing a metal dopant and having more uniform concentration distribution.SOLUTION: The method for producing a glass body contains: hydrolyzing a silicon compound and a compound containing a metal serving as a dopant, in a flame from a burner to form glass fine particles; and depositing and growing the formed glass fine particles on a base material, in which a raw material mixed gas containing a gas of the silicon compound, a gas of the compound containing a metal serving as a dopant, and either one of a combustible gas and a combustion supporting gas is fed into a central nozzle (A) positioning in the center of the burner; the other gas of the combustible gas and the combustion supporting gas is fed into a nozzle (B) different from the central nozzle (A) of the burner; a combustible gas or a combustion supporting gas is arbitrarily fed into a nozzle different from the nozzles (A) and (B); and a flow rate of the raw material mixed gas is 50-90% of the largest flow rate among flow rate(s) of the combustible gas(es) and the combustion supporting gas(es) fed from other nozzle or nozzles than the central nozzle (A).