CHARGED PARTICLE BEAM APPARATUS, DEFECT OBSERVATION DEVICE AND ADMINISTRATIVE SERVER

PROBLEM TO BE SOLVED: To provide a charged particle beam apparatus preventing an increase of process troubles caused by a deterioration of review performance such as nondetection of failure, by detecting failure or possible failure of operation affecting apparatus performance during a processing seq...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MIYAKE KOZO, OBARA KENJI, HIRAI TOMOHIRO, KONISHI JUNKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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