THERMAL NANOIMPRINTING METHOD

PROBLEM TO BE SOLVED: To provide a thermal nanoimprinting method which enables time for manufacturing one transfer molding to be short, and energy consumption to be small.SOLUTION: The thermal nanoimprinting method includes: a first pressing process for arranging a laminate in which a stamper 53, a...

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Bibliographische Detailangaben
Hauptverfasser: TAKATANI YOSHITERU, HAYASHIDA YOSHIHISA, HAJIMA YUJI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a thermal nanoimprinting method which enables time for manufacturing one transfer molding to be short, and energy consumption to be small.SOLUTION: The thermal nanoimprinting method includes: a first pressing process for arranging a laminate in which a stamper 53, a transfer object 55 and a mold 57 are arranged in this order, between one stage 19 of a first pressing machine and the other stage 21 of the first pressing machine, the first pressing machine having the one stage 19 and the other stage 21 which are heated and maintained at a predetermined temperature lower than a glass transition temperature of the transfer object, and for pressing the laminate with the first pressing machine; and the second pressing process for arranging the pressed laminate between one stage 27 of a second pressing machine, the stage 27 being heated and maintained at a predetermined temperature equal to or higher than the glass transition temperature of the transfer object, and the other stage 29 of the second pressing machine, the stage 29 being heated and maintained at a predetermined temperature lower than the glass transition temperature of the transfer object, and for further pressing the laminate with the second pressing machine.