ACTUATOR

PROBLEM TO BE SOLVED: To provide an actuator that can reduce the possibility that the contaminant proceeds to the outside.SOLUTION: An actuator is configured to include a first portion and a second portion and configured so that the first portion moves relative to the second portion. A labyrinth sea...

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Bibliographische Detailangaben
Hauptverfasser:	VAN DER BREI FREDRIK WILHELM, HENNUS PIETER RENAAT MARIA, JOHANNES CHARLES ADRIANUS VAN DEN BERG, BUIS EDWIN JOHAN, JOHANNES ANDREAS HENRICUS MARIA JACOBS
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an actuator that can reduce the possibility that the contaminant proceeds to the outside.SOLUTION: An actuator is configured to include a first portion and a second portion and configured so that the first portion moves relative to the second portion. A labyrinth seal is provided between the first portion and the second portion. The labyrinth seal restricts the flow of gas toward a second side of the labyrinth seal from a first side of the labyrinth seal. One or more inlets and one or more outlets are provided within the labyrinth seal, and the one or more inlets are configured to deliver the gas to a position within the labyrinth seal, and one or more outlets are configured to remove at least one part of the gas from the position within the labyrinth seal.