SPINNER CLEANING DEVICE

PROBLEM TO BE SOLVED: To provide a spinner cleaning device in which water droplets containing contaminants do not adhere to the inside of a cleaning water receiving container under cleaning.SOLUTION: A spinner cleaning device has a spinner table rotating while sucking and holding a wafer, cleaning w...

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Bibliographische Detailangaben
1. Verfasser:	KOZAI HIROHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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