SPINNER CLEANING DEVICE

PROBLEM TO BE SOLVED: To provide a spinner cleaning device in which water droplets containing contaminants do not adhere to the inside of a cleaning water receiving container under cleaning.SOLUTION: A spinner cleaning device has a spinner table rotating while sucking and holding a wafer, cleaning water supply means for supplying cleaning water to the wafer held on the spinner table, a cleaning water receiving container having an annular outer peripheral side wall, an annular inner peripheral side wall and a bottom wall which surround the spinner table, driving means for moving the cleaning water supply means between a cleaning position at which the wafer held on the spinner table is cleaned and a retraction position, and exhaust means that is connected to the bottom wall of the cleaning water receiving container and exhausts air in the cleaning water receiving container. The inside of the cleaning water receiving container is subjected to a hydrophilic treatment.