OPTICAL IMAGING DEVICE WITH SYSTEM DIAPHRAGM

PROBLEM TO BE SOLVED: To provide an optical imaging device which can be used in a narrow installation space in an optical system for semiconductor lithography and has a system diaphragm which generates no particles soiling a lens.SOLUTION: An optical imaging device (PL) comprises at least one system...

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Hauptverfasser:	GUEN WILLIAM, BISCHOFF THOMAS, GERHARD SZEKELY, HUBER MARTIN, BERNHARD GERLICH, BEKE HERMANN, MARTIN E HUMPHREYS, FRANCO HENTSHERING
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an optical imaging device which can be used in a narrow installation space in an optical system for semiconductor lithography and has a system diaphragm which generates no particles soiling a lens.SOLUTION: An optical imaging device (PL) comprises at least one system diaphragm (1), and the system diaphragm comprises a plurality of movable thin plates curved in a spherical shape and mounted to be capable of rotating. The movable thin plates are mounted on the pivot axis by means of an integral solid state articulation in order to rotate without contacting each other.