BENDING VIBRATION PIECE, BENDING VIBRATOR, OSCILLATOR, AND ELECTRONIC DEVICE
PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece that allows a second electrode to be surely formed in a step portion of a piezoelectric film by being extended to the step portion.SOLUTION: A crystal vibration piece (bending vibration piece) 1 includes: a base 2; a vibrating arm 3 th...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a piezoelectric vibration piece that allows a second electrode to be surely formed in a step portion of a piezoelectric film by being extended to the step portion.SOLUTION: A crystal vibration piece (bending vibration piece) 1 includes: a base 2; a vibrating arm 3 that is formed by being extended from the base 2 and performs bending vibration; and a laminated structure 9 that has an excitation electrode (a first electrode) 12, an excitation electrode (a second electrode) 22, and a piezoelectric layer 6 arranged between the excitation electrodes 12 and 22. The laminated structure 9 is formed at least on the vibrating arm 3, with the excitation electrode 12 on a side of the vibrating arm 3. The excitation electrode 22 is further extended from the laminated structure 9 all the way to the base 2 and is included in a step portion 7 at an end of the piezoelectric layer 6. In the step portion 7, the excitation electrode 22 has a widened portion 4 that is wider than a portion thereof formed in the vibrating arm 3. |
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