DUAL PHYSICAL QUANTITY SENSOR
PROBLEM TO BE SOLVED: To reduce the number of parts and costs.SOLUTION: A dual physical quantity sensor includes: a pressure sensor 3A for detecting the pressure of a first object to be measured; a pressure sensor 3B for detecting the pressure of a second object to be measured; a temperature sensor...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To reduce the number of parts and costs.SOLUTION: A dual physical quantity sensor includes: a pressure sensor 3A for detecting the pressure of a first object to be measured; a pressure sensor 3B for detecting the pressure of a second object to be measured; a temperature sensor 4 for detecting the temperatures of the pressure sensor 3A and the pressure sensor 3B; a first correction section for correcting to exclude variation due to a temperature change from the detection signal of the pressure sensor 3A, and outputting the signal after the correction as the measurement signal of the first object to be measured; and a second correction section for correcting to exclude variation due to a temperature change from the detection signal of the pressure sensor 3B, and outputting the signal after the correction as the measurement signal of the second object to be measured. The temperature sensor 4 is integrated together in a state of being brought into contact with the pressure sensor 3A and the pressure sensor 3B. |
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