LAMINATED STRUCTURE, BENDING VIBRATION PIECE, RESONATOR, OSCILLATOR, AND ELECTRONIC DEVICE
PROBLEM TO BE SOLVED: To provide a reliable bending vibration piece.SOLUTION: A bending vibration pieces 100 has: a base 110; arms 111, 112, and 113 projecting from the base 110; and laminated structures 2a, 2b, and 2c that are laminated so as to be in close contact with respective main surfaces 115...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a reliable bending vibration piece.SOLUTION: A bending vibration pieces 100 has: a base 110; arms 111, 112, and 113 projecting from the base 110; and laminated structures 2a, 2b, and 2c that are laminated so as to be in close contact with respective main surfaces 115 of the arms 111, 112, and 113. The laminated structures 2a, 2b, and 2c have: respective piezoelectric layers 10; respective upper electrodes 40a, 40b, and 40c provided on respective front surfaces of the piezoelectric layers 10; and respective lower electrodes 50a, 50b, and 50c provided on respective reverse surfaces of the piezoelectric layers 10. The upper electrodes 40a, 40b, and 40c and the lower electrodes 50a, 50b, and 50c are arranged so as not to overlap one another in planar view. Even in case of a pinhole occurring in the piezoelectric layers 10, thus, a short circuit between the upper electrodes 40a, 40b, and 40c and the lower electrodes 50a, 50b, and 50c is prevented. |
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