ANALYZER AND MANUFACTURING METHOD OF ANALYZER

PROBLEM TO BE SOLVED: To provide an analyzer capable of quickly analyzing a target at low cost.SOLUTION: A recess 2 is formed in a semiconductor substrate 1 by depth etching. A sensor part 5 is a field effect device formed in the recess 2 and its electrical characteristics change in accordance with...

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Bibliographische Detailangaben

Hauptverfasser:	MIYAHARA YUJI, MURAKAMI YUJI, SAKAMOTO KENJI, ISHINO SHOTARO, MIYAKE AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY BEER BIOCHEMISTRY CHEMISTRY ENZYMOLOGY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY MICROBIOLOGY MUTATION OR GENETIC ENGINEERING PHYSICS SPIRITS TESTING VINEGAR WINE
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