ANALYZER AND MANUFACTURING METHOD OF ANALYZER

PROBLEM TO BE SOLVED: To provide an analyzer capable of quickly analyzing a target at low cost.SOLUTION: A recess 2 is formed in a semiconductor substrate 1 by depth etching. A sensor part 5 is a field effect device formed in the recess 2 and its electrical characteristics change in accordance with...

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Hauptverfasser:	MIYAHARA YUJI, MURAKAMI YUJI, SAKAMOTO KENJI, ISHINO SHOTARO, MIYAKE AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR ENZYMOLOGY OR MICROBIOLOGY BEER BIOCHEMISTRY CHEMISTRY ENZYMOLOGY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY MICROBIOLOGY MUTATION OR GENETIC ENGINEERING PHYSICS SPIRITS TESTING VINEGAR WINE
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an analyzer capable of quickly analyzing a target at low cost.SOLUTION: A recess 2 is formed in a semiconductor substrate 1 by depth etching. A sensor part 5 is a field effect device formed in the recess 2 and its electrical characteristics change in accordance with a reaction of a target set in a gate area to a reagent. Pump parts 6A, 6B are formed in the recess 2 to perform at least one of supply and discharge of a liquid containing a reagent to/from the sensor part 5. A cover part 3 is bonded to the semiconductor substrate 1 so as to cover the recess 2 and is provided with an inlet and an outlet for a liquid to and from the recess 2.