ATOMIC FORCE MICROSCOPE AND CANTILEVER SUPPORT OF THE SAME

PROBLEM TO BE SOLVED: To provide an atomic force microscope which can precisely detect interaction quantity due to interatomic force between a cantilever and a sample with a measurement method using light such as an optical lever method, even when the cantilever is driven in high speed in the Z dire...

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Bibliographische Detailangaben
Hauptverfasser:	OKAZAKI YASUTAKA, UCHIHASHI TAKAYUKI, ANDO TOSHIO
Format:	Patent
Sprache:	eng
Schlagworte:	APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] MEASURING PHYSICS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an atomic force microscope which can precisely detect interaction quantity due to interatomic force between a cantilever and a sample with a measurement method using light such as an optical lever method, even when the cantilever is driven in high speed in the Z direction, and to provide a cantilever support of the atomic force microscope.SOLUTION: An atomic force microscope 100 comprises: a cantilever support 13 for supporting a cantilever 14; and a Z scanner 12 for driving the cantilever support 13 with a height direction as a driving direction. The cantilever support 13 comprises: a cantilever attachment part which projects in a direction perpendicular to the driving direction of the Z scanner 12; and a balance projection part which projects in a direction opposite to the projecting direction of the cantilever attachment part.