CLEAN ROOM, AND METHOD OF CONTROLLING AIR SUPPLY DEVICE THEREOF

PROBLEM TO BE SOLVED: To provide a clean room along with a method of controlling an air supply device in the clean room, capable of efficiently exhausting dust at a position in a low cleanliness area where a high heating apparatus is provided, and capable of keeping a high cleanliness area at a high...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUMOTO NAOFUMI, SHIOTANI MASAKI, TAKEMASA YUICHI, ICHINO MASAYUKI, TAKUMA YASUTO
Format: Patent
Sprache:eng
Schlagworte:
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