CLEAN ROOM, AND METHOD OF CONTROLLING AIR SUPPLY DEVICE THEREOF

CLEAN ROOM, AND METHOD OF CONTROLLING AIR SUPPLY DEVICE THEREOF

PROBLEM TO BE SOLVED: To provide a clean room along with a method of controlling an air supply device in the clean room, capable of efficiently exhausting dust at a position in a low cleanliness area where a high heating apparatus is provided, and capable of keeping a high cleanliness area at a high...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: MATSUMOTO NAOFUMI, SHIOTANI MASAKI, TAKEMASA YUICHI, ICHINO MASAYUKI, TAKUMA YASUTO
Format: Patent
Sprache:eng
Schlagworte:
AIR-CONDITIONING, AIR-HUMIDIFICATION, VENTILATION, USE OF AIRCURRENTS FOR SCREENING
BLASTING
HEATING
LIGHTING
MECHANICAL ENGINEERING
RANGES
VENTILATING
WEAPONS
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a clean room along with a method of controlling an air supply device in the clean room, capable of efficiently exhausting dust at a position in a low cleanliness area where a high heating apparatus is provided, and capable of keeping a high cleanliness area at a high cleanliness level.SOLUTION: From a high heating apparatus FFU11 in a low cleanliness area LA of a clean room R, an air A is supplied which has a blow-out speed at which a blow-back air A from a floor 6 reaches a ceiling 7. From a high cleanliness area FFU12 provided in a high cleanliness area HA, the air A is supplied at a blow-out speed at which it does not reach the floor 6.