SUBSTRATE INSPECTING APPARATUS AND IMAGE FORMING APPARATUS

PROBLEM TO BE SOLVED: To allow inspection of a product program to be carried out while allowing efficient inspection using an inspection program, by separately storing the inspection program and the product program.SOLUTION: A substrate inspecting apparatus (substrate checker) 20 is equipped with an...

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Bibliographische Detailangaben
1. Verfasser:	MIYAZAKI KYOICHI
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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