THICKNESS TILT SENSOR

PROBLEM TO BE SOLVED: To provide a thickness tilt sensor capable of measuring at the same time the tilt angle and the thickness of an object having front surface reflection and rear surface reflection and further having a thickness.SOLUTION: A thickness tilt sensor has an optical system comprising a...

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1. Verfasser: KATSURA SHINICHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a thickness tilt sensor capable of measuring at the same time the tilt angle and the thickness of an object having front surface reflection and rear surface reflection and further having a thickness.SOLUTION: A thickness tilt sensor has an optical system comprising a light projecting unit that emits a measuring light toward an object of measurement and a light receiving unit that receives the front surface-reflected light of the object of measurement and the rear surface-reflected light of the object of measurement, wherein the light projecting unit is equipped with a light projecting element, a light projecting lens and a means to thin a parallel light ray, the thin parallel light ray provided by the parallel light ray thinning means being used as the measuring light, the light receiving unit has a tilt angle measuring unit that receives the front surface-reflected light and a thickness measuring unit that receives the front surface-reflected light and the rear surface-reflected light, the tilt angle measuring unit has a light receiving lens for tilt angle measurement and a light receiving element for tilt angle measurement, and measures the tilt angle of the object of measurement, and the thickness measuring unit is equipped with a light receiving lens for thickness measurement and a light receiving element for thickness measurement, and measures the thickness of the object of measurement.