TWO-DIMENSIONAL SCANNER

PROBLEM TO BE SOLVED: To provide a two-dimensional scanner with less distortion of a two-dimensional image obtained from a two-dimensional scanning, having a highly accurate resolution, in a simple and compact structure.SOLUTION: A two-dimensional scanner 100 comprises a light source 111 for outputting a light, a mirror 121 for performing a scanning of an inspection face 101 in a X direction, a mirror 122 for performing a scanning of the inspection face 101 in a Y direction, a lens 131 having a different power in the X direction from that in the Y direction and having a positive power in the X direction, and a lens 132 having a different power in the X direction from that in the Y direction and having a positive power in the Y direction. The mirrors 121, 122 are disposed more closely to the light source 111 side than the lens group of the lenses 131, 132, and the lens group functions as an optical system of a telephoto type when scanning the inspection face 101 in one of the X and the Y directions, and functions as an optical system of a retrofocus type when scanning in the other direction.