RECOVERY SYSTEM, RECOVERY METHOD AND ANALYSIS METHOD

PROBLEM TO BE SOLVED: To provide a recovery system capable of easily recovering a chemical substance existing in a space.SOLUTION: The recovery system for recovering a substance in a space formed by one or a plurality of members includes: an introduction needle 13 having an introduction port for int...

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Bibliographische Detailangaben
Hauptverfasser:	UEDA TATSUJI, MURAKAMI MASASHI, NONAKA TATSUO, DOSONO MINA, KONO YUKIHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MATERIALS THEREFOR MEASURING ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a recovery system capable of easily recovering a chemical substance existing in a space.SOLUTION: The recovery system for recovering a substance in a space formed by one or a plurality of members includes: an introduction needle 13 having an introduction port for introducing a gas or a solvent into the space formed in the member; a supply pipe 14 for supplying the gas or the solvent into the space through the introduction port; a recovery needle 15 having a discharge port for discharging the gas or the solvent containing the substance from the space formed in the member; and a recovery pipe 16 for recovering the gas or the solvent containing the substance through the discharge port.