FORCE SENSOR

PROBLEM TO BE SOLVED: To provide a force sensor capable of detecting a temperature distribution in a substrate without forming a resistance element dedicated for monitoring on the substrate.SOLUTION: The present invention provides a force sensor including a plurality of Wheatstone bridge circuits H comprising four resistance elements including a resistance element for a strain detection resistor disposed on a connection part that is strained by external force. The four resistance elements comprise a resistance element S for strain detection, a resistance element 22 for monitoring having the same temperature characteristics as that of the resistance element S for strain detection disposed on a low potential side of the Wheatstone bridge circuits with the resistance element S for strain detection, and two resistance elements 31b and 31b for the Wheatstone bridge circuits disposed on a high potential side of the Wheatstone bridge circuits H having a different temperature characteristics from that of the resistance element S for strain detection. The sensor has a feature to detect an output value of the resistance element for monitoring to monitor temperature conditions of the resistance element 22 for monitoring.