CONTROL DEVICE OF MOLECULAR PUMP DEVICE

PROBLEM TO BE SOLVED: To provide a control device of a molecular pump device which has a function to automatically determine whether a cooling unit installed on a molecular pump is air-cooled or water-cooled, and also to set a control parameter used therein automatically, and also which can cope wit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SAKURAI MITSURU, IGA TOSHIHARU
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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