CONTROL DEVICE OF MOLECULAR PUMP DEVICE

PROBLEM TO BE SOLVED: To provide a control device of a molecular pump device which has a function to automatically determine whether a cooling unit installed on a molecular pump is air-cooled or water-cooled, and also to set a control parameter used therein automatically, and also which can cope wit...

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Bibliographische Detailangaben
Hauptverfasser:	SAKURAI MITSURU, IGA TOSHIHARU
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a control device of a molecular pump device which has a function to automatically determine whether a cooling unit installed on a molecular pump is air-cooled or water-cooled, and also to set a control parameter used therein automatically, and also which can cope with an abnormality of the cooling unit.SOLUTION: The control device 1 of the molecular pump device composed of the molecular pump 2 and an external control device 1 that controls the molecular pump 2 includes a discrimination means that determines whether the cooling means of the molecular pump 2 is air-cooled or water-cooled or whether the cooling means 21 is in an abnormal state.