EXHAUST UNIT AND DRY VACUUM PUMP DEVICE

PROBLEM TO BE SOLVED: To provide an exhaust unit provided inexpensively with a small number of parts, enabling miniaturization and silencing the noise, and a dry vacuum pump device comprising the exhaust unit.SOLUTION: In the exhaust unit 50 to be mounted in a multiple stage vacuum pump comprising a discharge port 18 for ejecting a gas to the final stage, and a pressure relief hole 19 in the middle part, an exhaust part check valve 51 connected with the discharge port 18 of the multiple stage vacuum pump 10, a middle part check valve 52 connected with the pressure relief hole 19 in the middle part, and a silencer 53 provided on the back flow side of the exhaust part check valve 51 and the middle part check valve 52 are provided integrally.