METHOD FOR MANUFACTURING SYNTHETIC QUARTZ GLASS

PROBLEM TO BE SOLVED: To provide a method for manufacturing synthetic quartz glass capable of adjusting the fluorine concentration to be ≥1,000 ppm mass.SOLUTION: This method includes processes for: (a) forming the porous glass body by depositing and growing on a base material, quartz glass particulate obtained by subjecting a glass forming raw material to flame hydrolysis; (b) obtaining the porous glass body containing fluorine by holding the porous glass body in a fluorine simple substance (F)-containing atmosphere at a temperature of ≤400°C in a reaction tank; and (c) obtaining a transparent glass body containing fluorine by heating the porous glass body containing fluorine up to a transparent-vitrification temperature in a vitrifying furnace; wherein, in the process (b), the fluorine simple substance (F) is supplied continuously or intermittently into the reaction tank, and gas in the reaction tank is discharged continuously or intermittently.