MASK CLEANER DEVICE FOR DRY COMPLETE TYPE ORGANIC EL AND MASK CLEANING METHOD FOR THE SAME

PROBLEM TO BE SOLVED: To provide a mask cleaner device for organic EL and the method, in which a large-size mask is washable and there is no application due to physical and thermal causes to the mask and no load growth to circumstances.SOLUTION: The mask cleaner device for dry complete type organic...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	KATAOKA FUMIO, YUMIBA KENJI, KATAGIRI KENJI, KITANI YUKA, IZAKI MAKOTO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CLEANING CLEANING IN GENERAL ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PERFORMING OPERATIONS PLASMA TECHNIQUE PREVENTION OF FOULING IN GENERAL PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a mask cleaner device for organic EL and the method, in which a large-size mask is washable and there is no application due to physical and thermal causes to the mask and no load growth to circumstances.SOLUTION: The mask cleaner device for dry complete type organic EL for removing an organic substance adhering to a surface from a mask containing the organic substance adhering to the surface in a vapor deposition process comprises a laser cleaning apparatus (10) carrying out a laser cleaning, an oxygen ashing device (20) carrying out an ashing by an oxygen plasma, an EUV apparatus (30) irradiating the surface of the mask with an EUV, and an atmospheric-pressure plasma treatment apparatus (40) carrying out an atmospheric-pressure plasma treatment, each being arranged mutually adjacently, and at the same time, a conveying means (50) for conveying the mask being provided.