GLASS SUBSTRATE WITH LIGHT SHIELDING FILM, AND LIQUID CRYSTAL DISPLAY DEVICE

PROBLEM TO BE SOLVED: To provide a glass substrate with a light shielding film that attains a sufficiently low refractive index in the visible light region and has superior fracture strength.SOLUTION: The glass substrate with the light shielding film has the light shielding film 30 with a multilayer...

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Bibliographische Detailangaben
Hauptverfasser: AKAO YASUHIKO, ICHIKURA EIJI, FUJIWARA AKIO, HIRUMA TAKEHIKO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a glass substrate with a light shielding film that attains a sufficiently low refractive index in the visible light region and has superior fracture strength.SOLUTION: The glass substrate with the light shielding film has the light shielding film 30 with a multilayer structure formed on a glass substrate 20, and the light shielding film with the multilayer structure has the structure, wherein a first chromium oxynitride film (CrON) 31 and a second chromium oxynitride film (CrON) 32 are laminated in this order from the transparent substrate side. Here, 0.15