METHOD OF DETECTING BACK SURFACE FOREIGN MATTER, BACK SURFACE FOREIGN MATTER DETECTING APPARATUS, AND APPLYING APPARATUS

PROBLEM TO BE SOLVED: To accurately and surely detect a harmful back surface foreign matter that may cause a slit nozzle to scratch an upper surface of a substrate to make a flaw, in a spinless coating method of a floating system. SOLUTION: A resist coating apparatus has a back surface foreign matte...

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Bibliographische Detailangaben
Hauptverfasser:	TAKAGI TAKAO, OTSUKA YOSHITAKA, INAMASU HISASHI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS SPRAYING OR ATOMISING IN GENERAL STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To accurately and surely detect a harmful back surface foreign matter that may cause a slit nozzle to scratch an upper surface of a substrate to make a flaw, in a spinless coating method of a floating system. SOLUTION: A resist coating apparatus has a back surface foreign matter detecting apparatus 50 to surely detect a harmful back surface foreign matter Q (which may cause a slit nozzle 14 to scratch an upper surface of a substrate G to make a flaw) on an upstream side in a substrate carrying direction (X direction) from the slit nozzle 14. In addition, in response to an warning signal WS generated when the back surface foreign matter detecting apparatus 50 detects such harmful back surface foreign matter Q, a main controller 52 lets the slit nozzle 14 immediately move upward via a nozzle elevating mechanism 36. Thereby. the slit nozzle 14 avoids an elevation part GQof the substrate G (avoids sliding contact or collision), and as a result, the damage to the slit nozzle 14 is prevented. COPYRIGHT: (C)2011,JPO&INPIT