VACUUM ULTRAVIOLET (UV) LIGHT-EMITTING ELEMENT AND SCINTILLATOR

PROBLEM TO BE SOLVED: To provide a vacuum UV light-emitting element which can be suitably used for photolithography, cleaning of substrates of a semiconductor and a liquid crystal, sterilization, a next generation large capacity optical disk, medical treatment (ophthalmic treatment, DNA cutting) and...

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Bibliographische Detailangaben
Hauptverfasser: YOSHIKAWA AKIRA, FUKUDA KENTARO, ISHIZU SUMUTO, KAWAGUCHI NORIAKI, FURUYA YUKI, YANAGIDA TAKEYUKI, YOKOTA ARITAME
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a vacuum UV light-emitting element which can be suitably used for photolithography, cleaning of substrates of a semiconductor and a liquid crystal, sterilization, a next generation large capacity optical disk, medical treatment (ophthalmic treatment, DNA cutting) and the like and emits high luminance light in a vacuum UV region; and to provide a scintillator for a radiation detector which is made of the vacuum UV light-emitting element and can be suitably used for cancer diagnosis and X-ray CT and the like by PET (positron-emission tomography). SOLUTION: The vacuum UV light-emitting element contains neodymium and is made of sodium fluoride lutetium crystal having a fluorite type crystal structure. The scintillator is made of the vacuum UV light-emitting element. COPYRIGHT: (C)2011,JPO&INPIT