CHARGED PARTICLE BEAM MICROSCOPE
PROBLEM TO BE SOLVED: To provide a charged particle beam microscope which can obtain information about pattern materials and stereostructure without lowering throughput of pattern dimension measurement. SOLUTION: The charged particle beam microscope acquires a plurality of frame images by scanning t...
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| creator | HAYATA YASUNARI TANAKA JUNICHI OKAI NOBUHIRO |
| description | PROBLEM TO BE SOLVED: To provide a charged particle beam microscope which can obtain information about pattern materials and stereostructure without lowering throughput of pattern dimension measurement. SOLUTION: The charged particle beam microscope acquires a plurality of frame images by scanning the field of view of the sample (S304, 305), adds the images together (S307), computes the dimensions of the pattern formed on the sample (308), and at the same time acquires pattern information (314) using a separated image (309, 310) composed of a single frame image comprising a frame image, a subframe image, and the like. COPYRIGHT: (C)2011,JPO&INPIT |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2011181389A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2011181389A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2011181389A3</originalsourceid><addsrcrecordid>eNrjZFBw9nAMcnd1UQhwDArxdPZxVXBydfRV8PV0DvIPdvYPcOVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGhoaGFobGFpaOxkQpAgAh7yIq</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>CHARGED PARTICLE BEAM MICROSCOPE</title><source>esp@cenet</source><creator>HAYATA YASUNARI ; TANAKA JUNICHI ; OKAI NOBUHIRO</creator><creatorcontrib>HAYATA YASUNARI ; TANAKA JUNICHI ; OKAI NOBUHIRO</creatorcontrib><description>PROBLEM TO BE SOLVED: To provide a charged particle beam microscope which can obtain information about pattern materials and stereostructure without lowering throughput of pattern dimension measurement. SOLUTION: The charged particle beam microscope acquires a plurality of frame images by scanning the field of view of the sample (S304, 305), adds the images together (S307), computes the dimensions of the pattern formed on the sample (308), and at the same time acquires pattern information (314) using a separated image (309, 310) composed of a single frame image comprising a frame image, a subframe image, and the like. COPYRIGHT: (C)2011,JPO&INPIT</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; MEASURING ; MEASURING ANGLES ; MEASURING AREAS ; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS ; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS ; PHYSICS ; TESTING</subject><creationdate>2011</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110915&DB=EPODOC&CC=JP&NR=2011181389A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20110915&DB=EPODOC&CC=JP&NR=2011181389A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>HAYATA YASUNARI</creatorcontrib><creatorcontrib>TANAKA JUNICHI</creatorcontrib><creatorcontrib>OKAI NOBUHIRO</creatorcontrib><title>CHARGED PARTICLE BEAM MICROSCOPE</title><description>PROBLEM TO BE SOLVED: To provide a charged particle beam microscope which can obtain information about pattern materials and stereostructure without lowering throughput of pattern dimension measurement. SOLUTION: The charged particle beam microscope acquires a plurality of frame images by scanning the field of view of the sample (S304, 305), adds the images together (S307), computes the dimensions of the pattern formed on the sample (308), and at the same time acquires pattern information (314) using a separated image (309, 310) composed of a single frame image comprising a frame image, a subframe image, and the like. COPYRIGHT: (C)2011,JPO&INPIT</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>MEASURING</subject><subject>MEASURING ANGLES</subject><subject>MEASURING AREAS</subject><subject>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</subject><subject>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</subject><subject>PHYSICS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2011</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZFBw9nAMcnd1UQhwDArxdPZxVXBydfRV8PV0DvIPdvYPcOVhYE1LzClO5YXS3AxKbq4hzh66qQX58anFBYnJqXmpJfFeAUYGhoaGFobGFpaOxkQpAgAh7yIq</recordid><startdate>20110915</startdate><enddate>20110915</enddate><creator>HAYATA YASUNARI</creator><creator>TANAKA JUNICHI</creator><creator>OKAI NOBUHIRO</creator><scope>EVB</scope></search><sort><creationdate>20110915</creationdate><title>CHARGED PARTICLE BEAM MICROSCOPE</title><author>HAYATA YASUNARI ; TANAKA JUNICHI ; OKAI NOBUHIRO</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2011181389A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2011</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><topic>MEASURING</topic><topic>MEASURING ANGLES</topic><topic>MEASURING AREAS</topic><topic>MEASURING IRREGULARITIES OF SURFACES OR CONTOURS</topic><topic>MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS</topic><topic>PHYSICS</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>HAYATA YASUNARI</creatorcontrib><creatorcontrib>TANAKA JUNICHI</creatorcontrib><creatorcontrib>OKAI NOBUHIRO</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HAYATA YASUNARI</au><au>TANAKA JUNICHI</au><au>OKAI NOBUHIRO</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CHARGED PARTICLE BEAM MICROSCOPE</title><date>2011-09-15</date><risdate>2011</risdate><abstract>PROBLEM TO BE SOLVED: To provide a charged particle beam microscope which can obtain information about pattern materials and stereostructure without lowering throughput of pattern dimension measurement. SOLUTION: The charged particle beam microscope acquires a plurality of frame images by scanning the field of view of the sample (S304, 305), adds the images together (S307), computes the dimensions of the pattern formed on the sample (308), and at the same time acquires pattern information (314) using a separated image (309, 310) composed of a single frame image comprising a frame image, a subframe image, and the like. COPYRIGHT: (C)2011,JPO&INPIT</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING |
| title | CHARGED PARTICLE BEAM MICROSCOPE |
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