PLASMA TREATMENT DEVICE

PROBLEM TO BE SOLVED: To provide a plasma treatment device that improves uniformity and efficiency of plasma treatment while facilitating insulation of electrodes. SOLUTION: In a scanning head, a structure having a flow path where treatment gas flows is connected to a covered electrode having a rod shape and a surface made of a solid dielectric. A workpiece is supported on the supporting face of a supporting electrode. The treatment gas is supplied to the inlet of the flow path. Pulse voltage is applied between the covered electrode and the supporting electrode. At least the flow path and the covered electrode near the outlet extends in directions other than the direction parallel to the supporting face. The covered electrode is arranged in the flow path, and has a clearance from the inner surface of the flow path. The discharge front end of the covered electrode is exposed to the outlet of the flow path. The front end of the scanning head has a clearance from the supporting face. COPYRIGHT: (C)2011,JPO&INPIT