PRETREATMENT AGENT AND PRETREATMENT METHOD FOR ELECTROPLATING AND ELECTROPLATING METHOD

PROBLEM TO BE SOLVED: To provide a pretreatment agent for electroplating, which does not inhibit adhesion between copper undercoat and a resist and does not inhibit adhesion between the copper undercoat and a copper electroplating film. SOLUTION: The pretreatment agent for electroplating is an aqueo...

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Bibliographische Detailangaben
Hauptverfasser: UCHIUMI MASAYUKI, OMURA NAOYUKI, OKAMACHI TAKUYA
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a pretreatment agent for electroplating, which does not inhibit adhesion between copper undercoat and a resist and does not inhibit adhesion between the copper undercoat and a copper electroplating film. SOLUTION: The pretreatment agent for electroplating is an aqueous solution essentially comprising (A) at least one adsorption inhibitor chosen from the group consisting of a triazole compound, a pyrazole compound, an imidazole compound, a cationic surfactant and an amphoteric surfactant and (B) chloride ion. COPYRIGHT: (C)2011,JPO&INPIT