MACHINING APPARATUS AND METHOD

PROBLEM TO BE SOLVED: To suppress deterioration in machining accuracy caused by high acceleration and deceleration of a machining head. SOLUTION: An auxiliary frame 17 is provided which supports a Y axis frame 3 having a laser machining head 7 movably along a pair of X axis frames 1 and which moves along the X axis frames 1 in parallel with and synchronously with the Y axis frame 3. In a mounting bracket 19 provided in the auxiliary frame 17 movably in the Y axis direction, there is provided a driving part 15 which corrects a head position and moves the laser machining head 7 in the X axis direction. When the Y axis frame 3 bends in the X axis direction in moving in the X axis direction, a sensor head 29 provided in a support arm 21 on the laser machining head 7 side measures a linear scale 25 provided in the mounting bracket 19, and detects displacement of the laser machining head 7 caused by the bending of the Y axis frame 3. In this instance, the driving part 15 for correcting head position is driven in a manner offsetting the bending of the Y axis frame 3 to correct the displacement of the laser machining head 7. COPYRIGHT: (C)2011,JPO&INPIT