ULTRAVIOLET SENSOR AND METHOD FOR MANUFACTURING SAME

PROBLEM TO BE SOLVED: To provide an ultraviolet sensor and a method for manufacturing the same, using low-cost inexpensive gallium oxide single-crystal substrate. SOLUTION: The ultraviolet sensor includes the gallium oxide single-crystal substrate 11 which uses an orthogonal plane 41, orthogonal wit...

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Bibliographische Detailangaben
Hauptverfasser:	KOHINATA MITSUGU, MASAKI SUSUMU, TAKEDA SATOSHI, ARAI NAOKI, HINO HARUMICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an ultraviolet sensor and a method for manufacturing the same, using low-cost inexpensive gallium oxide single-crystal substrate. SOLUTION: The ultraviolet sensor includes the gallium oxide single-crystal substrate 11 which uses an orthogonal plane 41, orthogonal with respect to the growing direction of gallium oxide single crystal or a surface tilted from the orthogonal plane 41 by a prescribed angle as a light receiving surface 12r; an ohmic electrode 13 formed on a first surface of the gallium oxide single crystal substrate 11; and a Schottky electrode 12, formed on a second surface of the gallium oxide single crystal substrate 11 including the light-receiving surface 12r. COPYRIGHT: (C)2011,JPO&INPIT