CONTINUOUS CASTING METHOD OF SILICON INGOT

PROBLEM TO BE SOLVED: To provide a continuous casting method of a silicon ingot capable of preventing a molten silicon from being contaminated by metal impurities caused by an atmospheric gas naturally convecting in a chamber at the time of continuous casting by an electromagnetic casting method. SOLUTION: In the continuous casting method of the silicon ingot 3 wherein a silicon raw material 11 is charged in a bottomless cooling crucible 7 arranged in a chamber 1, the silicon raw material 11 is melted by the electromagnetic induction heating from an induction coil 8 and the molten silicon 12 is solidified while pulling down the molten silicon 12 from the cooling crucible 7, a piping 15 opened at an upper part and a lower part of the cooling crucible 7 is connected to a side wall of the chamber 1 and a partition plate 16 is provided between the upper end of the cooling crucible 7 and the side wall of the chamber 1, the casting is performed intercepting the flow of the atmosphere gas flowing into the upper part from the lower part of the cooling crucible 7 by the partition plate 16 while introducing the upper atmosphere gas of the cooling crucible 7 under the cooling crucible 7 through the piping 15. COPYRIGHT: (C)2011,JPO&INPIT