CAPACITIVE ELECTROMECHANICAL CONVERSION DEVICE
PROBLEM TO BE SOLVED: To provide a capacitive electromechanical conversion device having superior sensitivity and reliability as a result of adjustment of the strength in the border between a vibration part and a support part, which supports the vibration part. SOLUTION: The capacitive electromechan...
Gespeichert in:
Hauptverfasser: | , , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a capacitive electromechanical conversion device having superior sensitivity and reliability as a result of adjustment of the strength in the border between a vibration part and a support part, which supports the vibration part. SOLUTION: The capacitive electromechanical conversion device has at least one cell. The cell includes: a first electrode 2; a movable vibration part that includes a second electrode 4 facing to the first electrode 2 and provided apart from an airspace 3; and supporting parts 8 and 9 which support the vibration part. Strength adjusting parts 6 and 10 are provided for adjusting the strength of the border part of the vibration part and the support parts 8 and 9. COPYRIGHT: (C)2011,JPO&INPIT |
---|