SAMPLE FOR IMAGE RESOLUTION EVALUATION, CHARGED PARTICLE BEAM DEVICE, AND SAMPLE PREPARATION METHOD

PROBLEM TO BE SOLVED: To provide a more ideal standard sample for resolution evaluation of a charged particle beam device. SOLUTION: A sample preparation method for the charged particle device includes a step of forming fine irregularities on the surface of a substrate, a step of dripping on the sub...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ARAKI MINE, DAN MURASAKI, NYUI CHIHIRO, KOI ASAMI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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