SAMPLE FOR IMAGE RESOLUTION EVALUATION, CHARGED PARTICLE BEAM DEVICE, AND SAMPLE PREPARATION METHOD

PROBLEM TO BE SOLVED: To provide a more ideal standard sample for resolution evaluation of a charged particle beam device. SOLUTION: A sample preparation method for the charged particle device includes a step of forming fine irregularities on the surface of a substrate, a step of dripping on the sub...

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Hauptverfasser:	ARAKI MINE, DAN MURASAKI, NYUI CHIHIRO, KOI ASAMI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a more ideal standard sample for resolution evaluation of a charged particle beam device. SOLUTION: A sample preparation method for the charged particle device includes a step of forming fine irregularities on the surface of a substrate, a step of dripping on the substrate colloid metal or metal fine particles dispersed in an ionic liquid, and a step of removing the solution dripped on the substrate. Also, the sample preparation method for the charged particle device includes a step of forming fine irregularities on the surface of the substrate and a step of attaching metal fine particles on the surface of the substrate by sputtering. COPYRIGHT: (C)2011,JPO&INPIT