METHOD AND APPARATUS FOR SUPPLYING CHEMICAL

PROBLEM TO BE SOLVED: To provide a method and an apparatus for supplying a chemical capable of supplying a stable persulfate aqueous solution. SOLUTION: A sealed filling container having at least one solvent inlet port is filled with a certain amount of persulfate solid materials. The persulfate sol...

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Bibliographische Detailangaben

Hauptverfasser:	KAWASAKI MASATO, MORIMOTO MAKOTO, SHIKAMI SATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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