METHOD AND APPARATUS FOR SUPPLYING CHEMICAL

PROBLEM TO BE SOLVED: To provide a method and an apparatus for supplying a chemical capable of supplying a stable persulfate aqueous solution. SOLUTION: A sealed filling container having at least one solvent inlet port is filled with a certain amount of persulfate solid materials. The persulfate solid materials are dissolved by putting a solvent to the bottom of the filling container by an insertion tube inserted to the bottom of the filling container. The dissolved persulfate aqueous solution is discharged from the filling container, and put into a reservoir tank. In addition, a concentration of the persulfate aqueous solution discharged from the filling container is measured, whereby an amount of the solvent lacking for reaching a desired concentration is calculated. The persulfate aqueous solution of the desired concentration is prepared while putting the persulfate aqueous solution into the reservoir tank and concurrently putting the amount of the insufficient solvent into the reservoir tank. The method and the apparatus for supplying the chemical are thus provided for supplying the persulfate aqueous solution controlled to the desired concentration. COPYRIGHT: (C)2011,JPO&INPIT