METHOD FOR PRODUCING METALLIC MULTILAYER STRUCTURE

PROBLEM TO BE SOLVED: To provide a method for producing a metallic multilayer structure, in which the metallic multilayer structure is thinned and produced efficiently. SOLUTION: The metallic multilayer structure includes a first metal layer, a second metal layer and a third metal layer and is chara...

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Bibliographische Detailangaben
Hauptverfasser:	YAMAGATA SHINICHI, ABE YUGAKU, MASHIMA MASATOSHI, SUWATA OSAMU, INASAWA SHINJI, YOKOYAMA HIROSHI, NITTA KOJI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BASIC ELECTRIC ELEMENTS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM METALLURGY PERFORMING OPERATIONS PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method for producing a metallic multilayer structure, in which the metallic multilayer structure is thinned and produced efficiently. SOLUTION: The metallic multilayer structure includes a first metal layer, a second metal layer and a third metal layer and is characterized in that the first metal layer is arranged on one surface of the second metal layer and the third metal layer is arranged on the other surface of the second metal layer, and the first metal layer includes tungsten, the second metal layer includes copper and the third metal layer includes tungsten. The method for producing the metallic multilayer structure includes the steps of: forming the first metal layer on one surface of the second metal layer by molten salt bath plating; and forming the third metal layer on the other surface of the second metal layer by the molten salt bath plating. A molten salt bath to be used for the molten salt bath plating is prepared by melting a mixture including potassium fluoride, boron oxide and tungsten oxide. COPYRIGHT: (C)2011,JPO&INPIT