THIN FILM COATING DEVICE AND DOUBLE-SIDED THIN FILM COATING DEVICE

PROBLEM TO BE SOLVED: To provide an epoch-making thin film coating device and a double-sided thin film coating device using the same, capable of applying double-sided coating so as to form the thin film continuously, precisely, and speedily before dried, especially capable of reducing the damage of the metal-made film (body 5 to be coated) to be the substrate when producing a lithium ion battery-forming material, and reducing the failure due to generation or inclusion of abrasion powder at an end contact part of a nozzle, enabling the production of the lithium ion battery-forming material speedily by the both-sided coating. SOLUTION: The thin film coating device is so configured to prevent the film vibration that a great number of ejection holes 19 are formed in the opposing surface opposite to the film-like shaped body 5 to be coated of an air ejection support 18 in a floating type drying mechanism C so as to float and support the same by blowing air to both surfaces of the film-like shaped body 5 to be coated. A tip end contact part 6 of the nozzle 4 is formed of a synthetic resin material P or ceramics, etc. COPYRIGHT: (C)2011,JPO&INPIT