SUBSTRATE PROCESSING APPARATUS

PROBLEM TO BE SOLVED: To omit a mechanism rotating a substrate, when transferring it between processing chambers, and to prevent an substrate processing apparatus from increasing in size, in the substrate processing apparatus having a plurality of processing chambers where the substrate placed on a...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	MIURA YUZURU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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