METHOD OF MANUFACTURING CONDUCTOR TRACK ARRAY

METHOD OF MANUFACTURING CONDUCTOR TRACK ARRAY

PROBLEM TO BE SOLVED: To provide a method of manufacturing an air gap between conductor tracks that decreases in coupling capacity and is improved in mechanical or electrical characteristics as compared with conventional examples. SOLUTION: A conductor track array includes bases 1 and 2, at least tw...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: STICH ANDREAS, SCHINDLER GUENTHER, PAMLER WERNER, GABRIC ZVONIMIR
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method of manufacturing an air gap between conductor tracks that decreases in coupling capacity and is improved in mechanical or electrical characteristics as compared with conventional examples. SOLUTION: A conductor track array includes bases 1 and 2, at least two conductor tracks 4, a cavity 6, and a resist layer 5 covering the conductor tracks 4 to close the cavity 6. A carrier track TB having a width B2 narrower than the width B1 of the conductor tracks 4 is formed to form the air gap for reducing coupling capacity and signal delay by self-alignment technique below the conductor tracks 4 along side faces thereof. COPYRIGHT: (C)2011,JPO&INPIT