METHOD FOR ADJUSTING OUTPUT OF LASER DEVICE, LASER DEVICE AND INSPECTION DEVICE

PROBLEM TO BE SOLVED: To provide a method for easily and accurately adjusting an output of a laser device that emits prescribed light by a sum frequency generating means using light beams at different wavelengths; and to also provide a laser device adjusting the output by the above method, and an inspection device having the laser device as a light source. SOLUTION: A second nonlinear optical crystal 4 emits a laser beam at a wavelength of 266 nm. A third nonlinear optical crystal 8 emits a laser beam at a wavelength of 782 nm. These beams enter a fourth nonlinear optical crystal 11, where the beams are subjected to wavelength conversion by sum frequency generation to generate a light beam at a wavelength of 198.5 nm. Data of the angle of a reflection mirror 5, the angle of a wavelength selective reflection mirror 9 and the output of the laser beam at the wavelength of 198.5 nm measured in a measuring unit 13 are transmitted to a controller 14. The controller 14 adjusts angles of the reflection mirror 5 and of the wavelength selective reflection mirror 9 so that the maximum output is obtained. COPYRIGHT: (C)2011,JPO&INPIT