OSCILLATION ELEMENT, OPTICAL SCANNER, IMAGE PROJECTOR AND IMAGE FORMING APPARATUS
PROBLEM TO BE SOLVED: To provide an oscillation element in which the freedom degree of design can be remarkably improved while a desired oscillation characteristic is assured; and to provide an optical scanner and an image projector. SOLUTION: The oscillation element 30 includes: an oscillation part...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an oscillation element in which the freedom degree of design can be remarkably improved while a desired oscillation characteristic is assured; and to provide an optical scanner and an image projector. SOLUTION: The oscillation element 30 includes: an oscillation part (beam part 31) on which an optical mirror part 322 is provided; and a driving part (magnetic field imposing mean 70 or the like) which oscillates the oscillation part; wherein the oscillation part is formed by performing the processing of work hardening and age hardening, and in the oscillation part, the distortion amplitude is larger than 3×10-3, thus the freedom degree of design can be remarkably improved while assuring the desired oscillation characteristic. Further, components involved in driving together with the oscillation element 30 is made to be compact, thus the performance of an actuator device 1, an optical scanner and an image projector or the like can be improved. COPYRIGHT: (C)2011,JPO&INPIT |
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