SEISMIC ISOLATION DEVICE AND EXPOSURE SYSTEM
PROBLEM TO BE SOLVED: To provide a seismic isolation device capable of suppressing damage due to vibration of an earthquake or the like, and to provide an exposure system. SOLUTION: The seismic isolation device includes: a pedestal for mounting an object; and a hanging mechanism for hanging the pede...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a seismic isolation device capable of suppressing damage due to vibration of an earthquake or the like, and to provide an exposure system. SOLUTION: The seismic isolation device includes: a pedestal for mounting an object; and a hanging mechanism for hanging the pedestal in the gravity direction to support. The hanging mechanism HN is formed of a material with high rigidity, such as a metal, in a rod shape. The hanging mechanism HN is arranged so as to extend in the Z direction, and, for example, is embedded in each pillar member 83. An end on +Z side of the hanging mechanism HN is connected, for example, to a ceiling CL, and an end on -Z side is connected to a corner block 82 of a base plate BP. COPYRIGHT: (C)2011,JPO&INPIT |
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