PRESSURE SENSOR DEVICE

PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability and improve the accuracy and reliability of measurement signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 having therein a diaphragm 45, a piezoresistance element, an amplifier circuit and various adjusting c...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KAMIYANAGI KATSUMICHI, SAITO KAZUNORI, SHINODA SHIGERU, ASHINO KIMIYASU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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