PRESSURE SENSOR DEVICE

PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability and improve the accuracy and reliability of measurement signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 having therein a diaphragm 45, a piezoresistance element, an amplifier circuit and various adjusting c...

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Bibliographische Detailangaben
Hauptverfasser:	KAMIYANAGI KATSUMICHI, SAITO KAZUNORI, SHINODA SHIGERU, ASHINO KIMIYASU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability and improve the accuracy and reliability of measurement signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 having therein a diaphragm 45, a piezoresistance element, an amplifier circuit and various adjusting circuits is bonded to a seat member 42 so that the diaphragm 45 faces a through hole 46 of the seat member 42. The seat member 42 and a metal plate member 243 are bonded so that their through holes 46, 248 are connected. A metal pipe member 243 is adhered to a resin case 244 and the signal terminal 258 of the resin case 244 and the pressure sensor chip 41 are electrically connected by wire bonding 59 to make a pressure sensor cell 102. COPYRIGHT: (C)2011,JPO&INPIT