PRESSURE SENSOR DEVICE

PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability and improve the accuracy and reliability of measurement signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 having therein a diaphragm 45, a piezoresistance element, an amplifier circuit and various adjusting c...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KAMIYANAGI KATSUMICHI, SAITO KAZUNORI, SHINODA SHIGERU, ASHINO KIMIYASU
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator KAMIYANAGI KATSUMICHI
SAITO KAZUNORI
SHINODA SHIGERU
ASHINO KIMIYASU
description PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability and improve the accuracy and reliability of measurement signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 having therein a diaphragm 45, a piezoresistance element, an amplifier circuit and various adjusting circuits is bonded to a seat member 42 so that the diaphragm 45 faces a through hole 46 of the seat member 42. The seat member 42 and a metal plate member 243 are bonded so that their through holes 46, 248 are connected. A metal pipe member 243 is adhered to a resin case 244 and the signal terminal 258 of the resin case 244 and the pressure sensor chip 41 are electrically connected by wire bonding 59 to make a pressure sensor cell 102. COPYRIGHT: (C)2011,JPO&INPIT
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_JP2011102811A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>JP2011102811A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_JP2011102811A3</originalsourceid><addsrcrecordid>eNrjZBALCHINDg4NclUIdvUL9g9ScHEN83R25WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8V4BRgaGhoYGRhaGho7GRCkCAPzBH5Y</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>PRESSURE SENSOR DEVICE</title><source>esp@cenet</source><creator>KAMIYANAGI KATSUMICHI ; SAITO KAZUNORI ; SHINODA SHIGERU ; ASHINO KIMIYASU</creator><creatorcontrib>KAMIYANAGI KATSUMICHI ; SAITO KAZUNORI ; SHINODA SHIGERU ; ASHINO KIMIYASU</creatorcontrib><description>PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability and improve the accuracy and reliability of measurement signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 having therein a diaphragm 45, a piezoresistance element, an amplifier circuit and various adjusting circuits is bonded to a seat member 42 so that the diaphragm 45 faces a through hole 46 of the seat member 42. The seat member 42 and a metal plate member 243 are bonded so that their through holes 46, 248 are connected. A metal pipe member 243 is adhered to a resin case 244 and the signal terminal 258 of the resin case 244 and the pressure sensor chip 41 are electrically connected by wire bonding 59 to make a pressure sensor cell 102. COPYRIGHT: (C)2011,JPO&amp;INPIT</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; MEASURING ; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE ; PHYSICS ; SEMICONDUCTOR DEVICES ; TESTING</subject><creationdate>2011</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20110526&amp;DB=EPODOC&amp;CC=JP&amp;NR=2011102811A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20110526&amp;DB=EPODOC&amp;CC=JP&amp;NR=2011102811A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KAMIYANAGI KATSUMICHI</creatorcontrib><creatorcontrib>SAITO KAZUNORI</creatorcontrib><creatorcontrib>SHINODA SHIGERU</creatorcontrib><creatorcontrib>ASHINO KIMIYASU</creatorcontrib><title>PRESSURE SENSOR DEVICE</title><description>PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability and improve the accuracy and reliability of measurement signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 having therein a diaphragm 45, a piezoresistance element, an amplifier circuit and various adjusting circuits is bonded to a seat member 42 so that the diaphragm 45 faces a through hole 46 of the seat member 42. The seat member 42 and a metal plate member 243 are bonded so that their through holes 46, 248 are connected. A metal pipe member 243 is adhered to a resin case 244 and the signal terminal 258 of the resin case 244 and the pressure sensor chip 41 are electrically connected by wire bonding 59 to make a pressure sensor cell 102. COPYRIGHT: (C)2011,JPO&amp;INPIT</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>MEASURING</subject><subject>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2011</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBALCHINDg4NclUIdvUL9g9ScHEN83R25WFgTUvMKU7lhdLcDEpuriHOHrqpBfnxqcUFicmpeakl8V4BRgaGhoYGRhaGho7GRCkCAPzBH5Y</recordid><startdate>20110526</startdate><enddate>20110526</enddate><creator>KAMIYANAGI KATSUMICHI</creator><creator>SAITO KAZUNORI</creator><creator>SHINODA SHIGERU</creator><creator>ASHINO KIMIYASU</creator><scope>EVB</scope></search><sort><creationdate>20110526</creationdate><title>PRESSURE SENSOR DEVICE</title><author>KAMIYANAGI KATSUMICHI ; SAITO KAZUNORI ; SHINODA SHIGERU ; ASHINO KIMIYASU</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2011102811A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2011</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>MEASURING</topic><topic>MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KAMIYANAGI KATSUMICHI</creatorcontrib><creatorcontrib>SAITO KAZUNORI</creatorcontrib><creatorcontrib>SHINODA SHIGERU</creatorcontrib><creatorcontrib>ASHINO KIMIYASU</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KAMIYANAGI KATSUMICHI</au><au>SAITO KAZUNORI</au><au>SHINODA SHIGERU</au><au>ASHINO KIMIYASU</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PRESSURE SENSOR DEVICE</title><date>2011-05-26</date><risdate>2011</risdate><abstract>PROBLEM TO BE SOLVED: To reduce costs, improve long-term reliability and improve the accuracy and reliability of measurement signals in a pressure sensor device. SOLUTION: A pressure sensor chip 41 having therein a diaphragm 45, a piezoresistance element, an amplifier circuit and various adjusting circuits is bonded to a seat member 42 so that the diaphragm 45 faces a through hole 46 of the seat member 42. The seat member 42 and a metal plate member 243 are bonded so that their through holes 46, 248 are connected. A metal pipe member 243 is adhered to a resin case 244 and the signal terminal 258 of the resin case 244 and the pressure sensor chip 41 are electrically connected by wire bonding 59 to make a pressure sensor cell 102. COPYRIGHT: (C)2011,JPO&amp;INPIT</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_JP2011102811A
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title PRESSURE SENSOR DEVICE
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-04T09%3A19%3A53IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=KAMIYANAGI%20KATSUMICHI&rft.date=2011-05-26&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EJP2011102811A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true